HR: 0800h
AN: P21A-0227    [Abstracts]
TI: Micro-Scanning Electron Microscope and X-ray Spectrometer for Planetary Exploration
AU: * Blake, D F
EM: dblake@mail.arc.nasa.gov
AF: NASA Ames Research Center, MS 239-4, Moffett Field, CA 94035, United States
AU: Nguyen, C V
AF: NASA Ames Research Center, MS 229-1, Moffett Field, CA 94035, United States
AU: Dholakia, G
AF: NASA Ames Research Center, MS 229-1, Moffett Field, CA 94035, United States
AU: Ribaya, B P
AF: NASA Ames Research Center, MS 229-1, Moffett Field, CA 94035, United States
AU: Ribaya, B P
AF: Santa Clara University, Department of Electrical Engineering, Santa Clara, CA 95053, United States
AU: Niemann, D
AF: NASA Ames Research Center, MS 229-1, Moffett Field, CA 94035, United States
AU: Niemann, D
AF: Santa Clara University, Department of Electrical Engineering, Santa Clara, CA 95053, United States
AU: Ngo, V
AF: NASA Ames Research Center, MS 229-1, Moffett Field, CA 94035, United States
AU: McKenzie, C
AF: In Xitu, Inc., 2551 Casey Ave. Suite A, Mountain View, CA 94043, United States
AU: Rahman, M
AF: Santa Clara University, Department of Electrical Engineering, Santa Clara, CA 95053, United States
AU: Alam, A
AF: NASA Ames Research Center, MS 229-1, Moffett Field, CA 94035, United States
AU: Joy, D
AF: Oak Ridge National Laboratory, High Temperature Materials Laboratory, Oak Ridge, TN 38923, United States
AU: Espinosa, B
AF: In Xitu, Inc., 2551 Casey Ave. Suite A, Mountain View, CA 94043, United States
AB: Scanning Electron Microscopy combined with electron-induced X-ray Fluorescence Spectroscopy (SEM-EDX) is one of the most powerful techniques for characterizing surface morphology and composition with spatial resolution of a micrometer or better. SEM-EDX can elucidate natural processes such as low-temperature diagenesis, thermal or pressure induced metamorphism, volcanism/magmatism, atmosphere/crust interaction and the like. This information is useful for the investigation of the natural history of solar system objects. We are developing a prototype micromachined scanning electron microscope with X-ray spectrometer (MSEMS) for solar system exploration. The MSEMS is comprised of a carbon nanotube field emission (CNTFE) electron source integrated with a micro-electro-mechanical-system (MEMS) based electron gun and electron optics structure. The MSEMS system will utilize a piezoelectric sample stage, having scan ranges from a few angstroms to several hundreds of microns. Compared with conventional electron sources, the CNTFE source offers advantages of low power usage, ultra-small source size and simplicity of electrostatic focusing. The MSEMS instrument, including CNTFE source, MEMS electron optic column and piezoelectric sample stage, is envisioned to be 1-2 cm in height and will operate in the range of 500 eV to 15 KeV. The imaging resolution of MEMS is predicted to be ~10 nm at 5 KeV and the spatial resolution of the X-ray spectrometer will be ~1 μm at 15 KeV. We will present field emission data from our CNTFE source as well as the MEMS electron gun and piezostage designs.
DE: 0406 Astrobiology and extraterrestrial materials
DE: 5494 Instruments and techniques
DE: 6094 Instruments and techniques
DE: 6297 Instruments and techniques
SC: Planetary Sciences [P]
MN: 2007 Fall Meeting